研究内容

光化学反応

文献

On the Origin of Photochemically Generated Protons in Polymethacrylate Films -A New Structure of PAG
Journal of Photopolymer Science and Technology Volume 12, Number 4, 1999, p.637-640

The Importance of OH groups Containing Solid Films for High Sensitivity of Chemically Amprified Resists
Journal of Photopolymer Science and Technology Volume 13, Number 4, 2000, p.503-506


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Last modified: Tue Jun 20 22:35:09 JST 2000